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High performance La-doped HZO based ferroelectric capacitors by interfacial engineering
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Authors
Popovici, Mihaela Ioana
;
Bizindavyi, Jasper
;
Favia, Paola
;
Clima, Sergiu
;
Alam, Md Nur Kutubul
;
Ramachandran, R. K.
;
Walke, Amey
;
Celano, Umberto
;
Leonhardt, A.
;
Mukherjee, Shankha
;
Richard, Olivier
;
Illiberi, A.
;
Givens, M.
;
Delhougne, Romain
;
Van Houdt, Jan
;
Kar, Gouri Sankar
DOI
10.1109/IEDM45625.2022.10019525
EISBN
978-1-6654-8959-1
ISSN
2380-9248
Conference
International Electron Devices Meeting (IEDM)
Journal
na
Title
High performance La-doped HZO based ferroelectric capacitors by interfacial engineering
Publication type
Proceedings paper
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Conference contributions
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Version
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Date
Summary
3
20.500.12860/41626.3
*
2023-06-01T13:51:36Z
validation by library/open access desk
1
20.500.12860/41626
2023-05-25T20:20:22Z
*Selected version
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