Publication:

FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits

Date

2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019422
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Author(s)

Capogreco, Elena  
;
Arimura, Hiroaki  
;
Ritzenthaler, Romain  
;
Brus, Stephan  
;
Oniki, Yusuke  
;
Dupuy, Emmanuel  
;
Sebaai, Farid  
;
Radisic, Dunja  
;
Chan, BT  
;
Zhou, Daisy  
;
Machkaoutsan, V.
;
Yoon, S.
;
Itokawa, H.
;
Yamaguchi, M.
;
Gao, Z.
;
Fazan, P.
;
Chen, Y.
;
Subramanian, Sujith  
;
Ragnarsson, Lars-Ake  
;
Spessot, Alessio  
;
Dentoni Litta, Eugenio  

Journal

na

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1314 since deposited on 2023-05-25
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Acq. date: 2026-05-18

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