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FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits

dc.contributor.authorCapogreco, Elena
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorBrus, Stephan
dc.contributor.authorOniki, Yusuke
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorSebaai, Farid
dc.contributor.authorRadisic, Dunja
dc.contributor.authorChan, BT
dc.contributor.authorZhou, Daisy
dc.contributor.authorMachkaoutsan, V.
dc.contributor.authorYoon, S.
dc.contributor.authorItokawa, H.
dc.contributor.authorYamaguchi, M.
dc.contributor.authorGao, Z.
dc.contributor.authorFazan, P.
dc.contributor.authorChen, Y.
dc.contributor.authorSubramanian, Sujith
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSpessot, Alessio
dc.contributor.authorDentoni Litta, Eugenio
dc.date.accessioned2023-06-01T13:01:00Z
dc.date.available2023-05-25T20:20:23Z
dc.date.available2023-06-01T13:01:00Z
dc.date.issued2022
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000968800700079
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41631.2
dc.sourceWOS
dc.titleFinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
dc.typeProceedings paper
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorZhou, Daisy
dc.contributor.imecauthorSubramanian, Sujith
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.identifier.doi10.1109/IEDM45625.2022.10019422
dc.identifier.eisbn978-1-6654-8959-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceInternational Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 03-07, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/41631.2*2023-06-01T12:53:10Zvalidation by library/open access desk
120.500.12860/416312023-05-25T20:20:23Z

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