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FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
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Authors
Capogreco, Elena
;
Arimura, Hiroaki
;
Ritzenthaler, Romain
;
Brus, Stephan
;
Oniki, Yusuke
;
Dupuy, Emmanuel
;
Sebaai, Farid
;
Radisic, Dunja
;
Chan, BT
;
Zhou, Daisy
;
Machkaoutsan, V.
;
Yoon, S.
;
Itokawa, H.
;
Yamaguchi, M.
;
Gao, Z.
;
Fazan, P.
;
Chen, Y.
;
Subramanian, Sujith
;
Ragnarsson, Lars-Ake
;
Spessot, Alessio
;
Dentoni Litta, Eugenio
DOI
10.1109/IEDM45625.2022.10019422
EISBN
978-1-6654-8959-1
ISSN
2380-9248
Conference
International Electron Devices Meeting (IEDM)
Journal
na
Title
FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
Publication type
Proceedings paper
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Version
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Date
Summary
2
20.500.12860/41631.2
*
2023-06-01T12:53:10Z
validation by library/open access desk
1
20.500.12860/41631
2023-05-25T20:20:23Z
*Selected version
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