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Developing TSV wet cleaning chemistry for quantum computing application
dc.contributor.author | Le Tulzo, Harold | |
dc.contributor.author | Celeste, Loriana | |
dc.contributor.author | Tendero, Ines | |
dc.contributor.author | Derakhshandeh, Jaber | |
dc.contributor.author | Gerets, Carine | |
dc.contributor.author | Thomas, Candice | |
dc.contributor.author | Charbonnier, Jean | |
dc.contributor.author | Deschaseaux, Edouard | |
dc.contributor.author | Lazerand, Thierry | |
dc.contributor.author | Daviot, Jerome | |
dc.date.accessioned | 2023-06-04T20:11:49Z | |
dc.date.available | 2023-06-04T20:11:49Z | |
dc.date.issued | 2023-MAY 1 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.other | WOS:000989687200001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41687 | |
dc.source | WOS | |
dc.title | Developing TSV wet cleaning chemistry for quantum computing application | |
dc.type | Journal article | |
dc.contributor.imecauthor | Derakhshandeh, Jaber | |
dc.contributor.imecauthor | Gerets, Carine | |
dc.contributor.orcidimec | Derakhshandeh, Jaber::0000-0003-2448-9165 | |
dc.identifier.doi | 10.1016/j.mee.2023.112010 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.journal | MICROELECTRONIC ENGINEERING | |
dc.source.volume | 276 | |
imec.availability | Under review |
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