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Depth profiling with oxygen beams

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorBrijs, Bert
dc.contributor.authorDe Coster, Walter
dc.contributor.authorElst, Kathy
dc.date.accessioned2021-09-29T12:50:49Z
dc.date.available2021-09-29T12:50:49Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/416
dc.sourceIIOimport
dc.titleDepth profiling with oxygen beams
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage599
dc.source.endpage608
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
dc.source.conferencedate7/11/1993
dc.source.conferencelocationYokohama Japan
imec.availabilityPublished - open access


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