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Outlier analysis for understanding process variations and probable defects
dc.contributor.author | Gupta, Mihir | |
dc.contributor.author | Delgadillo, Paulina Rincon | |
dc.contributor.author | Suh, Hyo Seon | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Dusa, Mircea | |
dc.date.accessioned | 2023-06-20T10:33:07Z | |
dc.date.available | 2023-06-20T10:33:07Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4981-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844549800025 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41798 | |
dc.source | WOS | |
dc.title | Outlier analysis for understanding process variations and probable defects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gupta, Mihir | |
dc.contributor.imecauthor | Delgadillo, Paulina Rincon | |
dc.contributor.imecauthor | Suh, Hyo Seon | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Dusa, Mircea | |
dc.contributor.orcidimec | Gupta, Mihir::0000-0003-0286-7997 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.identifier.doi | 10.1117/12.2616679 | |
dc.identifier.eisbn | 978-1-5106-4982-8 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference | |
dc.source.conferencedate | FEB 24-MAY 27, 2022 | |
dc.source.volume | 12053 | |
imec.availability | Under review |
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