Publication:

Printability and propagation of stochastic defects through a study o defects programmed on EUV mask

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2602034
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Published version 994.63 KB

Author(s)

Das, Poulomi  
;
Moussa, Alain  
;
Beral, Christophe  
;
Gupta, Mihir  
;
Saib, Mohamed  
;
Halder, Sandip  
;
Charley, Anne-Laure  
;
Leray, Philippe  

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na

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920 since deposited on 2023-06-20
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1140 since deposited on 2023-06-20
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Acq. date: 2026-10-13

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