Publication:

Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Date

2021
Proceedings Paper
https://doi.org/10.1109/GFP51802.2021.9673877
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Author(s)

Rajendran, Khannan  
;
Pandey, Awanish  
;
Edinger, Pierre
;
Jo, Gaehun
;
Takabayashi, Alain Yuji
;
Khan, Muhammad Umar  
;
Verheyen, Peter  
;
Quack, Niels
;
Niklaus, Frank
;
Bogaerts, Wim  
;
Gylfason, Kristinn B.
;
Van Thourhout, Dries  

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na

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