dc.contributor.author | Rajendran, Khannan | |
dc.contributor.author | Pandey, Awanish | |
dc.contributor.author | Edinger, Pierre | |
dc.contributor.author | Jo, Gaehun | |
dc.contributor.author | Takabayashi, Alain Yuji | |
dc.contributor.author | Khan, Muhammad Umar | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Quack, Niels | |
dc.contributor.author | Niklaus, Frank | |
dc.contributor.author | Bogaerts, Wim | |
dc.contributor.author | Gylfason, Kristinn B. | |
dc.contributor.author | Van Thourhout, Dries | |
dc.date.accessioned | 2023-08-08T08:17:59Z | |
dc.date.available | 2023-06-20T10:34:26Z | |
dc.date.available | 2023-08-08T08:17:59Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1949-2081 | |
dc.identifier.other | WOS:000783824500029 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41849.2 | |
dc.source | WOS | |
dc.title | Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rajendran, Khannan | |
dc.contributor.imecauthor | Pandey, Awanish | |
dc.contributor.imecauthor | Khan, Muhammad Umar | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.imecauthor | Bogaerts, Wim | |
dc.contributor.imecauthor | Van Thourhout, Dries | |
dc.contributor.orcidext | Edinger, Pierre::0000-0002-7339-6662 | |
dc.contributor.orcidext | Jo, Gaehun::0000-0002-2752-7422 | |
dc.contributor.orcidext | Takabayashi, Alain Yuji::0000-0002-1654-6636 | |
dc.contributor.orcidext | Quack, Niels::0000-0001-5189-0929 | |
dc.contributor.orcidimec | Rajendran, Khannan::0000-0002-2195-655X | |
dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
dc.contributor.orcidimec | Khan, Muhammad Umar::0000-0001-5760-7485 | |
dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
dc.date.embargo | 2021-12-31 | |
dc.identifier.doi | 10.1109/GFP51802.2021.9673877 | |
dc.identifier.eisbn | 978-1-6654-2224-6 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | 17th IEEE International Conference on Group IV Photonics (GFP) | |
dc.source.conferencedate | DEC 07-10, 2021 | |
dc.source.conferencelocation | Malaga | |
dc.source.journal | na | |
imec.availability | Published - open access | |