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Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
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Authors
Rajendran, Khannan
;
Pandey, Awanish
;
Edinger, Pierre
;
Jo, Gaehun
;
Takabayashi, Alain Yuji
;
Khan, Muhammad Umar
;
Verheyen, Peter
;
Quack, Niels
;
Niklaus, Frank
;
Bogaerts, Wim
;
Gylfason, Kristinn B.
;
Van Thourhout, Dries
DOI
10.1109/GFP51802.2021.9673877
EISBN
978-1-6654-2224-6
ISSN
1949-2081
Conference
17th IEEE International Conference on Group IV Photonics (GFP)
Journal
na
Title
Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
Publication type
Proceedings paper
Embargo date
2021-12-31
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Summary
2
20.500.12860/41849.2
*
2023-08-08T08:12:22Z
validation by library/open access desk
1
20.500.12860/41849
2023-06-20T10:34:26Z
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