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Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

dc.contributor.authorRajendran, Khannan
dc.contributor.authorPandey, Awanish
dc.contributor.authorEdinger, Pierre
dc.contributor.authorJo, Gaehun
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorKhan, Umar
dc.contributor.authorVerheyen, Peter
dc.contributor.authorQuack, Niels
dc.contributor.authorNiklaus, Frank
dc.contributor.authorBogaerts, Wim
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2023-06-20T10:34:26Z
dc.date.available2023-06-20T10:34:26Z
dc.date.issued2021
dc.identifier.issn1949-2081
dc.identifier.otherWOS:000783824500029
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41849
dc.sourceWOS
dc.titleThermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
dc.typeProceedings paper
dc.contributor.imecauthorRajendran, Khannan
dc.contributor.imecauthorPandey, Awanish
dc.contributor.imecauthorKhan, Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidextEdinger, Pierre::0000-0002-7339-6662
dc.contributor.orcidextJo, Gaehun::0000-0002-2752-7422
dc.contributor.orcidextTakabayashi, Alain Yuji::0000-0002-1654-6636
dc.contributor.orcidextVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidextQuack, Niels::0000-0001-5189-0929
dc.contributor.orcidimecRajendran, Khannan::0000-0002-2195-655X
dc.contributor.orcidimecBogaerts, Wim::0000-0002-2110-2685
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.identifier.doi10.1109/GFP51802.2021.9673877
dc.identifier.eisbn978-1-6654-2224-6
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conference17th IEEE International Conference on Group IV Photonics (GFP)
dc.source.conferencedateDEC 07-10, 2021
imec.availabilityUnder review


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220.500.12860/41849.22023-08-08T08:12:22Zvalidation by library/open access desk
120.500.12860/41849*2023-06-20T10:34:26Z

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