Publication:

Impact of Sub-mu m Wafer Thinning on Latch-up Risk in STCO Scaling Era

Date

2021

Proceedings Paper

https://doi.org/10.23919/EOS/ESD52038.2021.9574787

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Author(s)

Serbulova, Kateryna

;

Chen, Shih-Hung

;

Hellings, Geert

;

Hiblot, Gaspard

;

Veloso, Anabela

;

;

;

Groeseneken, Guido

;

Horiguchi, Naoto

Journal

43rd Annual EOS/ESD Symposium (EOS/ESD) Proceedings

Metrics

1132 since deposited on 2023-06-20

Acq. date: 2026-01-09