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Wafer-level hermetically sealed silicon photonic MEMS
dc.contributor.author | Jo, Gaehun | |
dc.contributor.author | Edinger, Pierre | |
dc.contributor.author | Bleiker, Simon J. | |
dc.contributor.author | Wang, Xiaojing | |
dc.contributor.author | Takabayashi, Alain Yuji | |
dc.contributor.author | Sattari, Hamed | |
dc.contributor.author | Quack, Niels | |
dc.contributor.author | Jezzini, Moises | |
dc.contributor.author | Lee, Jun Su | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Zand, Iman | |
dc.contributor.author | Khan, Umar | |
dc.contributor.author | Bogaerts, Wim | |
dc.contributor.author | Stemme, Goran | |
dc.contributor.author | Gylfason, Kristinn B. | |
dc.contributor.author | Niklaus, Frank | |
dc.date.accessioned | 2023-06-20T10:35:26Z | |
dc.date.available | 2023-06-20T10:35:26Z | |
dc.date.issued | 2022-FEB 1 | |
dc.identifier.issn | 2327-9125 | |
dc.identifier.other | WOS:000750609100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41890 | |
dc.source | WOS | |
dc.title | Wafer-level hermetically sealed silicon photonic MEMS | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zand, Iman | |
dc.contributor.imecauthor | Khan, Umar | |
dc.contributor.imecauthor | Bogaerts, Wim | |
dc.contributor.orcidext | Jo, Gaehun::0000-0002-2752-7422 | |
dc.contributor.orcidext | Edinger, Pierre::0000-0002-7339-6662 | |
dc.contributor.orcidext | Bleiker, Simon J.::0000-0002-4867-0391 | |
dc.contributor.orcidext | Wang, Xiaojing::0000-0002-1774-6189 | |
dc.contributor.orcidext | Takabayashi, Alain Yuji::0000-0002-1654-6636 | |
dc.contributor.orcidext | Sattari, Hamed::0000-0002-4792-429X | |
dc.contributor.orcidext | Quack, Niels::0000-0001-5189-0929 | |
dc.contributor.orcidext | Verheyen, Peter::0000-0002-8245-9442 | |
dc.contributor.orcidext | Stemme, Goran::0000-0001-9552-4234 | |
dc.contributor.orcidimec | Khan, Umar::0000-0001-5760-7485 | |
dc.contributor.orcidimec | Bogaerts, Wim::0000-0002-2110-2685 | |
dc.contributor.orcidimec | Zand, Iman::0000-0001-9857-7331 | |
dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
dc.identifier.doi | 10.1364/PRJ.441215 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | A14 | |
dc.source.endpage | A21 | |
dc.source.journal | PHOTONICS RESEARCH | |
dc.source.issue | 2 | |
dc.source.volume | 10 | |
imec.availability | Under review |
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