Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

Chevalier, Xavier; Correia, Cindy Gomes; Pound-Lana, Gwenaelle; Bezard, Philippe; Serege, Matthieu; Petit-Etienne, Camille; Gay, Guillaume; Cunge, Gilles; Cabannes-Boue, Benjamin; Nicolet, Celia; Navarro, Christophe; Cayrefource, Ian; Mueller, Marcus; Hadziioannou, Georges; Iliopoulos, Ilias; Fleury, Guillaume; Zelsmann, Marc

doi:10.2494/photopolymer.34.11

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Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

Date

2021

Journal article

https://doi.org/10.2494/photopolymer.34.11

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Author(s)

Chevalier, Xavier

;

Correia, Cindy Gomes

;

Pound-Lana, Gwenaelle

;

Bezard, Philippe

;

Serege, Matthieu

;

Petit-Etienne, Camille

;

Gay, Guillaume

;

Cunge, Gilles

;

Cabannes-Boue, Benjamin

;

;

;

;

;

Hadziioannou, Georges

;

Iliopoulos, Ilias

;

Fleury, Guillaume

;

Zelsmann, Marc

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

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1183 since deposited on 2023-06-20

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Acq. date: 2026-05-19

Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

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