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Radiation performance of shallow trench isolation

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Authors
Claeys, Cor; Simoen, Eddy; Poyai, Amporn; Hayama, Kiyoteru; Kobayashi, K.; Ohyama, Hidenori; Mohammadzadeh, A.
Conference
Proceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications
Title
Radiation performance of shallow trench isolation
Publication type
Proceedings paper
Embargo date
9999-12-31
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220.500.12860/4199.22023-06-29T09:01:42Zvalidation by library/open access desk
120.500.12860/4199*2021-10-14T12:44:27Z

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