Publication:

BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP

Date

2023-04-28
Proceedings Paper
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Published version 1.29 MB

Author(s)

Hermans, Yannick  
;
Wu, Chen  
;
Buccheri, Nunzio  
;
Schleicher, Filip  
;
Versluijs, Janko  
;
Montero Alvarez, Daniel  
;
Dey, Bappaditya  
;
Wong, Patrick  
;
Rincon Delgadillo, Paulina  
;
Park, Seongho  
;
Tokei, Zsolt  
;
Leray, Philippe  
;
Halder, Sandip  

Journal

Proceedings of SPIE

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580 since deposited on 2023-06-26
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923 since deposited on 2023-06-26
1last month
Acq. date: 2026-01-11

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