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Towards accurate temperature prediction in BEOL for reliability assessment (Invited)

dc.contributor.authorLofrano, Melina
dc.contributor.authorOprins, Herman
dc.contributor.authorChang, Xinyue
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorPedreira, Olalla Varela
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorCherman, Vladimir
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCroes, Kristof
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2023-07-15T17:05:30Z
dc.date.available2023-07-15T17:05:30Z
dc.date.issued2023
dc.identifier.issn1541-7026
dc.identifier.otherWOS:001007431500027
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42151
dc.sourceWOS
dc.titleTowards accurate temperature prediction in BEOL for reliability assessment (Invited)
dc.typeProceedings paper
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorChang, Xinyue
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorPedreira, Olalla Varela
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecChang, Xinyue::0000-0003-1875-6132
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecCherman, Vladimir::0000-0002-8068-9236
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.identifier.doi10.1109/IRPS48203.2023.10117701
dc.identifier.eisbn978-1-6654-5672-2
dc.source.numberofpages7
dc.source.peerreviewyes
dc.source.conference61st IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 26-30, 2023
dc.source.conferencelocationMonterey
imec.availabilityUnder review


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VersionItemDateSummary
320.500.12860/42151.32024-01-09T16:19:05Zvalidation by library/open access desk
220.500.12860/42151.22023-07-17T06:08:28Zvalidation by imec author
120.500.12860/42151*2023-07-15T17:05:30Z

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