Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Quantitative TOFSIMS depth profiling of ultra thin silicon oxynitride films
View/
open
4197.pdf (217.5Kb)
Metadata
Show full item record
Authors
Conard, Thierry
;
De Witte, Hilde
;
Schaekers, Marc
;
Vandervorst, Wilfried
Conference
Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
Title
Quantitative TOFSIMS depth profiling of ultra thin silicon oxynitride films
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login