dc.contributor.author | Hwang, MinJin | |
dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Dehaerne, Enrique | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Shin, Young-Han | |
dc.date.accessioned | 2024-03-07T15:16:17Z | |
dc.date.available | 2023-07-28T17:39:47Z | |
dc.date.available | 2023-07-31T13:15:41Z | |
dc.date.available | 2024-03-07T15:16:17Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6099-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022962000004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42230.3 | |
dc.source | WOS | |
dc.title | SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hwang, MinJin | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.imecauthor | Dehaerne, Enrique | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Dehaerne, Enrique::0000-0001-9021-2469 | |
dc.identifier.doi | 10.1117/12.2657555 | |
dc.identifier.eisbn | 978-1-5106-6100-4 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 1249608 | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVII | |
dc.source.conferencedate | FEB 27-MAR 02, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12496 | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This research was supported by the MOTIE (Ministry of Trade, Industry, and Energy) in Korea, under the Fostering Global Talents for Innovative Growth Program (P0017312) supervised by the Korea Institute for Advancement of Technology (KIAT). | |