EISBN
978-1-5106-6100-4
ISBN
978-1-5106-6099-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVII
Journal
Proceedings of SPIE
Volume
12496
Title
SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering
Publication type
Proceedings paper