dc.contributor.author | Sun, Wei | |
dc.contributor.author | Doi, Ayumi | |
dc.contributor.author | Isawa, Miki | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Lorusso, Gian | |
dc.date.accessioned | 2024-03-25T13:36:32Z | |
dc.date.available | 2023-07-28T17:39:55Z | |
dc.date.available | 2024-03-25T13:36:32Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6099-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022962000054 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42233.2 | |
dc.source | WOS | |
dc.title | In-line Metrology for Vertical Edge Placement Control of Monolithic CFET using CD-SEM | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.contributor.orcidimec | Lorusso, Gian::0000-0003-3498-5082 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.identifier.doi | 10.1117/12.2656471 | |
dc.identifier.eisbn | 978-1-5106-6100-4 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVII | |
dc.source.conferencedate | FEB 27-MAR 02, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | N/A | |
dc.source.volume | 12496 | |
imec.availability | Published - imec | |