EISBN
978-1-5106-6100-4
ISBN
978-1-5106-6099-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVII
Journal
N/A
Volume
12496
Title
In-line Metrology for Vertical Edge Placement Control of Monolithic CFET using CD-SEM
Publication type
Proceedings paper