Publication:

Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2658501

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Author(s)

Ciesielski, Richard

;

Lohr, Leonhard M.

;

;

Charley, Anne-Laure

;

de Ruyter, Rudi

;

Bogdanowicz, Janusz

;

Hoenicke, Philipp

;

Abbasirad, Najmeh

;

Soltwisch, Victor

Journal

Proceedings of SPIE

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858 since deposited on 2023-07-28

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Acq. date: 2026-10-13