Publication:

Development on main chain scission resists for high-NA EUV lithography

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2657506

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Author(s)

Shirotori, Akihide

;

Hoshino, Manabu

;

Fujimura, Makoto

;

;

;

De Simone, Danilo

;

Vandenberghe, Geert

;

Sanuki, Hideaki

Journal

Proceedings of SPIE

Metrics

844 since deposited on 2023-07-28

Acq. date: 2025-12-16