Publication:

Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2657963

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Author(s)

Hoenicke, Philipp

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;

Soltwisch, Victor

;

Waehlish, Andre

;

Wauschkuhn, Nils

;

Scheerder, Jeroen

;

Fleischmann, Claudia

;

Bogdanowicz, Janusz

;

Charley, Anne-Laure

;

Veloso, Anabela

;

;

;

Hikavyy, Andriy

;

;

;

Gwalt, Grzegorz

;

;

Ciesielski, Richard

;

Beckhoff, Burkhard

Journal

Proceedings of SPIE

Metrics

977 since deposited on 2023-07-28

Acq. date: 2025-12-11