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Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

dc.contributor.authorCzerwinski, A.
dc.contributor.authorKatcki, J.
dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, C.
dc.contributor.authorRatajczak, J.
dc.contributor.authorGaubas, Eugenijus
dc.date.accessioned2021-10-14T12:46:12Z
dc.date.available2021-10-14T12:46:12Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4226
dc.sourceIIOimport
dc.titleStatistical analysis of shallow p-n junction leakage increase using XTEM results probabilities
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha
dc.source.conferencelocation
imec.availabilityPublished - imec


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