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Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy

dc.contributor.authorSaini, Nishant
dc.contributor.authorTierno, Davide
dc.contributor.authorCroes, Kristof
dc.contributor.authorAfanasiev, Valeri
dc.date.accessioned2023-11-30T14:31:01Z
dc.date.available2023-08-07T17:07:25Z
dc.date.available2023-11-30T14:31:01Z
dc.date.issued2023
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001027381700036
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42292.2
dc.sourceWOS
dc.titleExperimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorSaini, Nishant
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.identifier.doi10.1109/IITC/MAM57687.2023.10154814
dc.identifier.eisbn979-8-3503-1097-9
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/42292.2*2023-11-30T14:29:09Zvalidation by library/open access desk
120.500.12860/422922023-08-07T17:07:25Z

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