Publication:
Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy
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1008 since deposited on 2023-08-07
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Acq. date: 2026-08-05
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1008 since deposited on 2023-08-07
2last month
2last week
Acq. date: 2026-08-05
Citations