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Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy
Publication:
Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy
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Date
2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154814
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Saini, Nishant
;
Tierno, Davide
;
Croes, Kristof
;
Afanasiev, Valeri
Journal
na
Abstract
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1004
since deposited on 2023-08-07
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Acq. date: 2025-12-15
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Metrics
Views
1004
since deposited on 2023-08-07
1
last month
Acq. date: 2025-12-15
Citations