Publication:
Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy
| dc.contributor.author | Saini, Nishant | |
| dc.contributor.author | Tierno, Davide | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.imecauthor | Saini, Nishant | |
| dc.contributor.imecauthor | Tierno, Davide | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.contributor.orcidimec | Tierno, Davide::0000-0003-4915-904X | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.contributor.orcidimec | Afanasiev, Valeri::0000-0001-5018-4539 | |
| dc.date.accessioned | 2023-11-30T14:31:01Z | |
| dc.date.available | 2023-08-07T17:07:25Z | |
| dc.date.available | 2023-11-30T14:31:01Z | |
| dc.date.issued | 2023 | |
| dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154814 | |
| dc.identifier.eisbn | 979-8-3503-1097-9 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42292 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
| dc.source.conferencedate | MAY 22-25, 2023 | |
| dc.source.conferencelocation | Dresden | |
| dc.source.journal | na | |
| dc.source.numberofpages | 3 | |
| dc.subject.keywords | BREAKDOWN | |
| dc.title | Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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