Publication:

Exploring the Benefits of Cryogenic Temperatures for Co and Ru Metallizations

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154717
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Published version 879.11 KB

Author(s)

Tierno, Davide  
;
Ciofi, Ivan  
;
Parvais, Bertrand  
;
Croes, Kristof  
;
Varela Pedreira, Olalla  

Journal

IEEE International Conference on Interconnect Technology

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1137 since deposited on 2023-08-07
Acq. date: 2026-02-25

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1137 since deposited on 2023-08-07
Acq. date: 2026-02-25

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