On the TEM assessment of local strain distributions in integrated circuit structures

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Authors
Vanhellemont, Jan; Armigliato, A.; Frabboni, S.; Balboni, R.; Janssens, Koenraad
Conference
Proceedings of the 13th International Conference on Electron Microscopy - ICEM
Title
On the TEM assessment of local strain distributions in integrated circuit structures
Publication type
Proceedings paper
Embargo date
9999-12-31
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