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On the TEM assessment of local strain distributions in integrated circuit structures

dc.contributor.authorVanhellemont, Jan
dc.contributor.authorArmigliato, A.
dc.contributor.authorFrabboni, S.
dc.contributor.authorBalboni, R.
dc.contributor.authorJanssens, Koenraad
dc.date.accessioned2021-09-29T12:51:11Z
dc.date.available2021-09-29T12:51:11Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/423
dc.sourceIIOimport
dc.titleOn the TEM assessment of local strain distributions in integrated circuit structures
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage651
dc.source.endpage652
dc.source.conferenceProceedings of the 13th International Conference on Electron Microscopy - ICEM
dc.source.conferencedate17/07/1994
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesVol. 2A: Applications in Materials Science


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