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Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM

dc.contributor.authorAabdin, Zainul
dc.contributor.authorXu, XiuMei
dc.contributor.authorLeong, Fong Yew
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMirsaidov, Utkur
dc.date.accessioned2025-02-10T13:37:39Z
dc.date.available2023-08-30T14:16:48Z
dc.date.available2025-02-10T13:37:39Z
dc.date.issued2023-08
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42424.2
dc.titleObservation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM
dc.typeProceedings paper
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.embargo9999-12-31
dc.identifier.doi10.4028/p-u0ABQ4
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.beginpage105
dc.source.endpage110
dc.source.conferenceUCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces
dc.source.conferencedate2023-09-12
dc.source.conferencelocationBrugge
dc.source.journalSolid State Phenomena; Vol. 346
imec.availabilityPublished - imec


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