Authors

Aabdin, Zainul; Xu, XiuMei; Leong, Fong Yew; Holsteyns, Frank; Mirsaidov, Utkur

DOI

10.4028/p-u0ABQ4

ISSN

1662-9779

Conference

UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces

Journal

Solid State Phenomena; Vol. 346

Title

Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM

Publication type

Proceedings paper

Embargo date

9999-12-31