Browsing by author "Xu, XiuMei"

300 mm wafer development for pattern collapse evaluations

Xu, XiuMei; Tao, Zheng; Saib, Mohamed; Sebaai, Farid; Van de Kerkhove, Jeroen; Vrancken, Nandi; Vereecke, Guy; Holsteyns, Frank (2018)

300 mm wafer-level, ultra-dense arrays of Au-capped nanopillars with sub-10 nm gaps as reliable SERS substrates

Li, Jiaqi; Chen, Chang; Jans, Hilde; Xu, XiuMei; Verellen, Niels; Vos, Ingrid; Okumura, Yasuaki; Moshchalkov, Victor; Lagae, Liesbet; Van Dorpe, Pol (2014)

An ATR-FTIR based method for dynamic analysis of wetting transitions on superhydrophobic nanostructured surfaces

Vrancken, Nandi; Sergeant, Stefanie; Vereecke, Guy; Doumen, Geert; Holsteyns, Frank; Terryn, Herman; De Gendt, Stefan; Xu, XiuMei (2017)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; tsai, Wei-Kang; Kim, Dong-Wook; Lee, Eunsongyi; Lin, Chang-You; Van Dorpe, Pol; Struyf, Herbert; Holsteyns, Frank; Moshchalkov, Victor; indekeu, joseph; De Gendt, Stefan (2014)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; tsai, Wei-Kang; Kim, Dong-Wook; Lee, Eusonghyi; Lin, Chang You; Van Dorpe, Pol; Struyf, Herbert; Holsteyns, Frank; Moshchalkov, Victor; indekeu, joseph; De Gendt, Stefan (2014)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; tsai, Wei-Kang; Struyf, Herbert; Holsteyns, Frank; machalkov, victor; indekeu, joseph; De Gendt, Stefan (2013)

Capturing wetting states in nanopatterned silicon

Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; Struyf, Herbert; Holsteyns, Frank; De Gendt, Stefan (2013)

Challenges in wet processing of high aspect ratio nanostructures

Xu, XiuMei (2017)

Challenges in wet processing of high aspect ratio nanostructures

Xu, XiuMei (2017)

Characterization of superhydrophobic breakdown on nanostructured silicon surfaces

Xu, XiuMei; Vrancken, Nandi (2019)

Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique

Sebaai, Farid; Vereecke, Guy; Xu, XiuMei; Baudot, Sylvain; Amemiya, Fumihiro; Komori, Kana; Holsteyns, Frank (2018)

Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors

Anand, Utkarsh; Ghosh, Tanmay; Aabdin, Zainul; Vrancken, Nandi; Yan, Hongwei; Xu, XiuMei; Holsteyns, Frank; Mirsaidov, Utkur (2021)