Publication:

Effects of interfacial strength and dimension of structures on physical cleaning window

Date

2010
Meeting abstract
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Author(s)

Kim, Tae-Gon
;
Pacco, Antoine  
;
Wostyn, Kurt  
;
Xu, XiuMei  
;
Struyf, Herbert  
;
Arstila, Kai
;
Park, Jin-Goo
;
De Gendt, Stefan  
;
Mertens, Paul  
;
Heyns, Marc  

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