Effects of interfacial strength and dimension of structures on physical cleaning window

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Authors
Kim, Tae-Gon; Pacco, Antoine; Wostyn, Kurt; Xu, XiuMei; Struyf, Herbert; Arstila, Kai; Park, Jin-Goo; De Gendt, Stefan; Mertens, Paul; Heyns, Marc
Conference
10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
Title
Effects of interfacial strength and dimension of structures on physical cleaning window
Publication type
Meeting abstract
Embargo date
9999-12-31
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