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Conference contributions
Effects of interfacial strength and dimension of structures on physical cleaning window
Publication:
Effects of interfacial strength and dimension of structures on physical cleaning window
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Date
2010
Meeting abstract
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21224.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Tae-Gon
;
Pacco, Antoine
;
Wostyn, Kurt
;
Xu, XiuMei
;
Struyf, Herbert
;
Arstila, Kai
;
Park, Jin-Goo
;
De Gendt, Stefan
;
Mertens, Paul
;
Heyns, Marc
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1917
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations
Metrics
Views
1917
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations