Publication:

Effects of interfacial strength and dimension of structures on physical cleaning window

Date

2010
Meeting abstract
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dc.contributor.authorKim, Tae-Gon
dc.contributor.authorPacco, Antoine
dc.contributor.authorWostyn, Kurt
dc.contributor.authorXu, XiuMei
dc.contributor.authorStruyf, Herbert
dc.contributor.authorArstila, Kai
dc.contributor.authorPark, Jin-Goo
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T17:40:20Z
dc.date.available2021-10-18T17:40:20Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17376
dc.source.beginpage10
dc.source.conference10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
dc.source.conferencedate19/10/2010
dc.source.conferencelocationOostende Belgium
dc.source.endpage11
dc.title

Effects of interfacial strength and dimension of structures on physical cleaning window

dc.typeMeeting abstract
dspace.entity.typePublication
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