Publication:

Inorganic Capping Layers in RDL Technologies: Process Advantages and Reliability

Date

2023
Journal article
https://doi.org/10.1007/s11837-023-06015-x
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Published version 931.74 KB
Accepted version 4.77 MB

Author(s)

Chery, Emmanuel  
;
Brady-Boyd, Anita
;
Bhatia, Ritwik
;
Pinho, Nelson  
;
Slabbekoorn, John  
;
Armini, Silvia  
;
Sundaram, Ganesh
;
Beyne, Eric  

Journal

JOM

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336 since deposited on 2023-09-03
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1095 since deposited on 2023-09-03
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Acq. date: 2026-09-14

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