Spectroscopic study of oxygen related lattice defects in annealed silicon

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Authors
Vanhellemont, Jan; Libezny, Milan; Simoen, Eddy; Claeys, Cor; Clauws, P.; Blondeel, A.
Conference
22nd International Conference on Physics of Semiconductors
Title
Spectroscopic study of oxygen related lattice defects in annealed silicon
Publication type
Oral presentation
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