Authors

De Gendt, Stefan; Arnauts, Sophia; Witters, Thomas; Boehme, W.; Gonchond, J. P.; Huber, A.; Lerche, J.; Loewenstein, Lee; Rink, I.; Wortelboer, R.; Meuris, Marc; Heyns, Marc

Conference

Cleaning Technology in Semiconductor Device Manufacturing. Proceedings of the 6th International Symposium

Title

Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation system

Publication type

Proceedings paper

Embargo date

9999-12-31