Publication:

Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs

Date

2023
Journal article
https://doi.org/10.3390/mi14081514
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Published version 24.05 MB

Author(s)

Tyaginov, Stanislav  
;
O'Sullivan, Barry  
;
Vaisman Chasin, Adrian  
;
Rawal, Yaksh  
;
Chiarella, Thomas  
;
Toledo de Carvalho Cavalcante, Camila  
;
Kimura, Yosuke  
;
Vandemaele, Michiel  
;
Ritzenthaler, Romain  
;
Mitard, Jerome  
;
Vadakupudhu Palayam, Senthil  
;
Reifsnider, Jason  
;
Kaczer, Ben  

Journal

MICROMACHINES

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