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Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications

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Acq. date: 2026-09-18

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Downloads

182 since deposited on 2023-09-15
11last month
2last week
Acq. date: 2026-09-18

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143 since deposited on 2023-09-15
2last month
Acq. date: 2026-09-18

Citations