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Spectroscopic study of oxygen related lattice defects in annealed silicon

dc.contributor.authorVanhellemont, Jan
dc.contributor.authorLibezny, Milan
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorClauws, P.
dc.contributor.authorBlondeel, A.
dc.date.accessioned2021-09-29T12:51:17Z
dc.date.available2021-09-29T12:51:17Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/425
dc.sourceIIOimport
dc.titleSpectroscopic study of oxygen related lattice defects in annealed silicon
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conference22nd International Conference on Physics of Semiconductors
dc.source.conferencedate15/08/1994
dc.source.conferencelocationVancouver Canada
imec.availabilityPublished - imec


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