Publication:

Hermetically sealed on-chip packaging of MEMS devices

Date

2000

Proceedings Paper

Simple item page Full metadata Statistics

Files

4251.pdf 429.31 KB

Author(s)

;

Tilmans, Harrie

;

Van De Peer, Myriam

;

;

Beerten, Steven

;

;

Van Hoof, Chris

Statistics

1975 since deposited on 2021-10-14

Acq. date: 2026-09-22