dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Ritzenthaler, Romain | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2023-12-15T08:41:03Z | |
dc.date.available | 2023-10-17T17:31:59Z | |
dc.date.available | 2023-12-15T08:41:03Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0018-9383 | |
dc.identifier.other | WOS:001078339700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42793.2 | |
dc.source | WOS | |
dc.title | Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions | |
dc.type | Journal article | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Ritzenthaler, Romain | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | Arimura, Hiroaki::0000-0002-3138-708X | |
dc.contributor.orcidimec | de Marneffe, Jean-Francois::0000-0001-5178-6670 | |
dc.contributor.orcidimec | Brus, Stephan::0000-0003-3554-0640 | |
dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.identifier.doi | 10.1109/TED.2023.3314001 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 6658 | |
dc.source.endpage | 6664 | |
dc.source.journal | IEEE TRANSACTIONS ON ELECTRON DEVICES | |
dc.source.issue | 12 | |
dc.source.volume | 70 | |
imec.availability | Published - imec | |