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Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

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Acq. date: 2026-06-06

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1650 since deposited on 2023-10-17
76last month
Acq. date: 2026-06-06

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1028 since deposited on 2023-10-17
Acq. date: 2026-06-06

Citations