Publication:

Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

Date

2023
Journal article
https://doi.org/10.1109/ted.2023.3314001
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Author(s)

Franco, Jacopo  
;
Arimura, Hiroaki  
;
de Marneffe, Jean-Francois  
;
Brus, Stephan  
;
Ritzenthaler, Romain  
;
Croes, Kristof  
;
Kaczer, Ben  
;
Horiguchi, Naoto  

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES

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2306 since deposited on 2023-10-17
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1036 since deposited on 2023-10-17
Acq. date: 2026-10-04

Citations